Impact of focused ion beam assisted front end processing on n-MOSFET degradation

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2002, Pages 369-375

  Lugstein, Alois ^a   Brezna, W ^a   Bertagnolli, E ^a  

^a VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER MOBILITY; DEGRADATION; ELECTRIC DISCHARGES; INTEGRATED CIRCUITS; ION BEAMS; IRRADIATION;

FOCUSED ION BEAM (FIB) SYSTEMS;

MOSFET DEVICES;

EID: 0036089639     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)

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