Modeling and performance evaluation for automated material handling systems in a 300mm foundry fab

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 2002, Pages 3181-3186

  Huang, Han Pang ^a   Wang, Chun Tsong ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT LAYOUT; INTELLIGENT CONTROL; MATERIALS HANDLING EQUIPMENT; PETRI NETS; PLANNING; SYSTEMS ANALYSIS;

AUTOMATED MATERIAL HANDLING SYSTEMS; PROCESS FLOW MODELING;

FACTORY AUTOMATION;

EID: 0036058626     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Simulation and dispatching for automated material handling system in a 300 mm FAB
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3. Simulation in the design of ground-based intrabay automation systems
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5. Integrated manufacturing system modeling and simulation using distributed colored timed Petri net
6. Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net
7. AMHS for 300 mm wafer
8. Composite dispatching rules for multiple - Vehicle AGV systems
9. Study of AGVS design and dispatching rules by analytical and simulation methods
10. Scheduling semiconductor wafer fabrication
11. Priority-based tool capacity allocation in the foundry fab
12. Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing system: A Petri Net approach