Modelling, control and simulation of an IC wafer fabrication system: A generalized stochastic coloured timed Petri Net approach

International Journal of Production Research

Volumn 38, Issue 14, 2000, Pages 3305-3341

  Lin, Ming Hung ^a   Fu, Li Chen ^b  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FABRICATION; PERFORMANCE; PETRI NETS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

PROCESS-FLOW MODEL;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 0034692664     PISSN: 00207543     EISSN: 1366588X     Source Type: Journal    
DOI: 10.1080/002075400418270     Document Type: Article

References (57)

1. Agnetis, A., Arbib, C. and Nicolo, F., 1990, Part routing in flexible assembly systems. IEEE Transactions on Robotics and Automation, 6, 697-705.
2. Allam, M. and Alla, H., 1998, Modeling and simulation of an electronic component manufacturing system using hybrid Petri Nets. IEEE Transactions on Semiconductor Manufacturing, 11, 374-383.
3. Anderson, E. J. and Nyirenda, J. C., 1990, Two new rules to minimize tardiness in a job shop. International Journal of Production Research, 28, 2277-2292.
4. Ayache, J. M., Courrtiat, J. P. and DIAZ, M., 1982, REBUS, a fault-tolerant distribution system for industrial real-time control. IEEE Transactions on Computing, 31, 637-674.
5. Baer, J. L. and Ellis, C. A., 1977, Model design and evaluation of a compiler for a parallel processing environment. IEEE Transactions on Software Engineering, 3, 394-405.
6. Bispo, C. F. G., Sentieiro, J. J. S. and Hibberd, R. D., 1992, Adaptive scheduling for highvolume shops. IEEE Transactions on Robotics and Automation, 8, 696-706.
7. Chen, H., Harrison, J. M., Mandelbaum, A., Van Ackere, A. and Wein, L. M., 1988, Empirical evaluation of a queuing network model for semiconductor wafer fabrication. Operation Research, 36, 202-215.
8. Chen, C. L., Lee, C. S. G. and Mcgillem, C. D., 1987, Task assignment and load balancing of autonomous vehicles in a flexible manufacturing system. IEEE Transactions on Robotics and Automation, 3, 659 671.
9. Csatary, P., Nolan, D., Wolf, P. and Honold, A., 1998, 300mm Fab layout and automation concepts. Future Fab, 1.
10. Desrochers, A. A. and Al-Jaar, R. Y., 1994, Applications of Petri Nets in Manufacturing Systems: Modeling, Control, and Performance Analysis (New York: IEEE Press).
11. Diaz, M., 1982, Modeling and analysis of communication and cooperation protocols using Petri net based models. Computer Networks, 6.
12. Dolgui, A. and Ofitserov, D., 1997, A stochastic method for discrete and continuous optimization in manufacturing systems. Journal of Intelligent Manufacturing, August, 405-413.
13. Duenyas, L., Fowler, J. W. and Schruben, L. W., 1994, Planning and scheduling in Japanese semiconductor manufacturing. Journal of Manufacturing Systems, 13, 323-332.
14. FRANCE, S., 1982, Sequencing and Scheduling: an Introduction to the Mathematics of the Jobshop (New York: Wiley).
15. Glassey, R. C. and Weng, W. W., 1991, Dynamic batching heuristic for simultaneous processing. IEEE Transactions on Semiconductor Manufacturing, 4, 77-82.
16. Hillion, H. P. and Proth, J.-M., 1989, Performance evaluation of job-shop systems using timed event-graphs. IEEE Transactions on Automatic Control, 34, 3-9.
17. H OITOMT, D. J., Luh, P. B., Max, E. and Pattipati, K. R., 1991, Scheduling jobs with simple precedence constraints on parallel machines. IEEE Control Systems Magazine, 10.
18. Janneck, J. W. and Naedele, M., 1998, Modeling a die bonder with Petri Nets: a case study. IEEE Transactions on Semiconductor Manufacturing, 11, 404-409.
19. Jeng, M. D., Xie, X. and Chou, S. W., 1998, Modeling, qualitative analysis, simulation, and performance evaluation of the etching area in an IC wafer fabrication system using Petri Nets. IEEE Transactions on Semiconductor Manufacturing, 11, 358-373.
20. Johri, P. K., 1993, Practical issues in scheduling and dispatching in semiconductor wafer fabrication. Journal of Manufacturing Systems, 12, 474-485.
21. Kasturia, E., Docesare, F. and Desrochers, D., 1988, Real-time control of multilevel manufacturing systems using coloured Petri nets. Proceedings of the IEEE Conference on Robotics and Automation, pp. 1114-1119.
22. Kim, Y.-D., Kim, J.-U., Lim, S.-K. and Jun, H.-B., 1998, Due-date based scheduling and control policies in a multi-product semiconductor wafer fabrication facility. IEEE Transactions on Semiconductor Manufacturing, 11, 155-164.
23. Kim, Y.-D., Lee, D.-H. and Kim, J.-U., 1998, A simulation study on lot release control, mask scheduling, and batch scheduling in semiconductor wafer fabrication facilities. Journal of Manufacturing Systems, 17, 107-117.
24. Leachman, R. C. and Hodges, D. A., 1996, Benchmarking semiconductor manufacturing. IEEE on Semiconductor Manufacturing, 9, 158-169.
25. Lee, K. H. and Favrel, J., 1985, Hierarchical reduction method for analysis and decomposition of Petri nets. IEEE Transactions on Systems, Man and Cybernetics, 15, 272-280.
26. Lee, K. H., Favrel, J. and Baptiste, P., 1987, Generalized Petri net reduction method. IEEE Transactions on Systems, Man and Cybernetics, 17, 297-303.
27. Lee, L. Y. and Dicesare, F., 1992, Experimental study of a heuristic function for FMS scheduling. JAPAN/USA Symposium on Flexible Automation, 2, 1171-1177.
28. Li, S., Tang, T. and Collins, D. W., 1996, Minimum inventory variability schedule with applications in semiconductor fabrication. IEEE Transactions on Semiconductor Manufacturing, 9, 145-1496.
29. Lin, S. and Whung, H.-P., 1998, Modeling and emulation of a furnace in IC Fab based on colored-timed Petri Net. IEEE Transactions on Semiconductor Manufacturing, 11, 410-420.
30. Luh, P. B., Hoitomt, D. J., Max, E. and Pattipati, K. R., 1990, Scheduling generation and reconfiguration for parallel machines. IEEE Transactions on Robotics and Automation, 6, 687-696.
31. Mahmoodi, F., Dooley, K. J. and Starr, P. J., 1990, An investigation of dynamic group scheduling heuristics in a job shop manufacturing cell. International Journal of Production Research, 28, 1695-1711.
32. Missale, R., 1998, Expectations on automation for 300mm semiconductor Fab operations. Future Fab, 1.
33. Molloy, M. K., 1982, Performance analysis using stochastic Petri nets. IEEE Transactions on Computers, 31, 913-917.
34. Molloy, M. K., 1985, Discrete time stochastic Petri nets. IEEE Transactions on Software Engineering, 11, 417-423.
35. Mosley, S. A., Teyner, T. and Uzsoy, R. M., 1998, Maintenance scheduling and staffing policies in a wafer fabrication facility. IEEE Transactions on Semiconductor Manufacturing, 11, 316-323.
36. Murata, T., 1989, Petri nets: properties, analysis and applications. Proceedings of the Institute of Electrical and Electronics Engineers, 77, 541-580.
37. Narahari, Y. and Khan, L. M., 1997, Modeling the effect of hot lots in semiconductor manufacturing systems. IEEE Transactions on Semiconductor Manufacturing, 10, 185± 188.
38. Narahari, Y. and Viswanadham, N., 1985, A Petri net approach to modeling and analysis of flexible manufacturing system. Annals of Operations Research, 3, 449-472.
39. Plata, J. J., 1997, 300 mm Fab design - a total factory perspective. Future Fab, 1, 21-7.
40. Rao, G. N. and Wang, H. P., 1991, Evaluation and dynamic allocation of AS/RS control rules: a simulation study. The International Journal of Advanced Manufacturing Technology, 62-82.
41. Ramamoorthy, C. V. and Ho, G. S., 1980, Performance evaluation of asynchronous concurrent systems using Petri Nets. IEEE Transactions on Software Engineering, 6, 440-449.
42. Robertson, F. and Gargini, P., 1998, 300mm conversion capability. Future Fab, 1.
43. Rogers, R. V. and Preston White, K., Jr, 1991, Algebraic, mathematical programming, and network models of the deterministic job-shop scheduling problem. IEEE Transactions on Systems, Man, and Cybernetics, 21.
44. SAIT, S. M. and YOUSSEF, H., 1995, VLSI Physical Design Automation: Theory and Practice (New York: McGraw-Hill).
45. Sarin, S.C., Ahn, S. and Bishop, A.B., 1988, An improved branching scheme for the branch and bound procedure of scheduling n jobs on m parallel machines to minimize total weighted flowtime. International Journal of Production Research 26, 1183-1191.
46. Sawik, S., 1990, Modelling and scheduling of a flexible manufacturing system. European Journal of Operational Research, 45, 177-190.
47. Shaw, M. J., 1988, Knowledge-based scheduling in flexible manufacturing systems: an integration of pattern-directed inference and heuristic search. International Journal of Production Research, 26, 821-844.
48. Srinivasan, R. S., 1998, Modeling and performance analysis of cluster tools using Petri Nets. IEEE Transactions on Semiconductor Manufacturing, 11, 394-403.
49. Sze, S. M., 1983, VLSI Technology (New York: McGraw-Hill).
50. Uzsoy, R., Lee, C.-Y. and Martin-Vega, L. A., 1992, A review of production planning and scheduling models in the semiconductor industry partFF1: system characteristics, performance evaluation and production planning. IIE Transactions, 24, 47-60.
51. Uzsoy, R., Lee, C.-Y. and Martin-Vega, L. A., 1994, A review of production planning and scheduling models in the semiconductor industry part FFo: shop-floor control. IIE Transactions, 26, 44-55.
52. Uzsoy, R., Martin-Vega, L. A., Lee, C.-Y. and Leonard, P. A., 1991, Production scheduling algorithm for a semiconductor test facility. IEEE Transactions on Semiconductor Manufacturing, 4, 270-279.
53. Valavanis, K. P., 1990, On the hierarchical modeling analysis and simulation of flexible manufacturing systems with extended Petri nets. IEEE Transactions on Systems, Man and Cybernetics, 20, 94-109.
54. Xiong, H. H. and Zhou, M., 1998, Scheduling of semiconductor test facility via Petri Nets and hybrid huristic sarch. IEEE Transactions on Semiconductor Manufacturing, 11, 384-393.
55. Zhou, M. and Der Jeng, M., 1998, Modeling, nalysis, simulation, scheduling, and control of semiconductor manufacturing system: a Petri net approach. IEEE Transactions on Semiconductor Manufacturing, 11, 333-357.
56. Zhou, M. C., Dicesare, F. and Rudolph, D., 1990, Control of a flexible manufacturing system using Petri nets. Proceedings of the IFAC Congress, 9, 43-48.
57. Zurawski, R. and Zhou, M., 1994, Petri Nets and industrial applications: a tutorial. IEEE Transactions on Industrial Electronics, 41, 567-583.