Modeling and performance evaluation of a controlled IC fab using distributed colored timed Petri net

Proceedings - IEEE International Conference on Robotics and Automation

Volumn 3, Issue , 2000, Pages 2191-2196

  Kuo, Chung Hsien ^a   Huang, Han Pang ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPONENT OBJECT MODEL; DISTRIBUTED COLORED TIMED PETRI NET; INTEGRATED CIRCUIT FOUNDRY FAB; LOT CYCLE TIME; MANUFACTURING EXECUTION SYSTEM; TOOL MODEL LIBRARY; WAFER IN PROCESS;

CHEMICAL VAPOR DEPOSITION; DIFFUSION; ETCHING; FABRICATION; INTEGRATED CONTROL; ION IMPLANTATION; OXIDATION; PETRI NETS; PHOTORESISTS;

AUTOMATION;

EID: 0033692345     PISSN: 10504729     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (20)

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