Evaluation of ASML ATHENA alignment system on Intel front-end processes

Proceedings of SPIE-The International Society for Optical Engineering

Volumn 4689 I, Issue , 2002, Pages 286-294

  Pugh, Graham M ^a   Giorgi, Maria R ^b  

^a Intel Corporation Belgium   (Belgium)

^b INTEL CORPORATION   (United States)

Author keywords

Alignment; ATHENA; Overlay; Registration

Indexed keywords

ALIGNMENT; MICROELECTRONIC PROCESSING; OPTIMIZATION; SENSITIVITY ANALYSIS;

ALIGNMENT SYSTEMS; FRONT-END PROCESSES;

MICROPROCESSOR CHIPS;

EID: 0036029658     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.473468     Document Type: Article

References (6)

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