Fabrication of micropatterned dielectric thin films on self-assembled monolayers

Key Engineering Materials

Volumn 214-215, Issue , 2002, Pages 157-162

  Masuda, Y ^a   Wang, D ^a   Won Seon Seo, ^a   Koumoto, K ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

Micro device; Micropatterning; Selective deposition; Self assembled monolayer; Thin film; Titanium dioxide

Indexed keywords

DIELECTRIC FILMS; NUCLEATION; SELF ASSEMBLY; TITANIUM DIOXIDE;

MICROPATTERNED DIELECTRIC THIN FILMS;

THIN FILMS;

EID: 0036027883     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (21)