Application of phase-imaging tapping-mode atomic-force microscopy to investigate the grain growth and surface morphology of TiSi2

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 5, 2002, Pages 1866-1869

  Pang, C H ^a   Hing, P ^a   See, A ^b  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b Chartered Semiconductor Manufacturing   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRAIN GROWTH; GRAIN SIZE AND SHAPE; MORPHOLOGY; PHASE TRANSITIONS; SURFACES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

PHASE IMAGING TAPPING MODE ATOMIC FORCE MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY MICROGRAPHS;

TITANIUM ALLOYS;

EID: 0036026346     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1501580     Document Type: Article

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