AFM measurement of the grain size in polycrystalline titanium silicides

Microelectronic Engineering

Volumn 55, Issue 1-4, 2001, Pages 93-99

  Cazzaniga, F ^a   Pavia, G ^a   Sabbadini, A ^a   Spiga, S ^b   Queirolo, G ^a  

^a STMICROELECTRONICS   (Italy)

^b LABORATORIO MDM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; NUCLEATION; PHASE TRANSITIONS; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

POLYCRYSTALLINE TITANIUM SILICIDES;

TITANIUM COMPOUNDS;

EID: 0034824090     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00433-0     Document Type: Article

References (5)

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3. C.A. Sukov, R.J. Nemanich, Comparison of the interface and surface morphologies of zirconium and titanium silicides on silicon, in: MRS Symp. Proc., Vol. 260, MRS, Pittsburgh, 1992, pp. 251-256.
4. H. Jeon, C.A. Sulow, J.W. Honeycutt, G.A. Rozgonyi, R.J. Nemanich, J. Appl. Phys. 71 (1992) 4629.
5. I. De Wolf, D.J. Howard, A. Lauwers, K. Maex, H.E. Maes, Appl. Phys. Lett. 70 (1997) 2262.