New and simple method of contact processing characterization using atomic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 1, 1996, Pages 22-29

  Mariolle, D ^a   Lafond, D ^a   Morand, Y ^b  

^a CEA LETI   (France)

^b CEA GRENOBLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0011406939     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588452     Document Type: Article

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