Efficient gettering of low concentrations of copper contamination to hydrogen induced nanocavities in silicon

Applied Physics Letters

Volumn 73, Issue 18, 1998, Pages 2639-2641

  Kinomura, A ^a   Williams, J S ^b   Wong Leung, J ^b   Petravic, M ^b   Nakano, Y ^c   Hayashi, Y ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001440786     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122538     Document Type: Article

References (15)

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