Gettering of Fe to below 1010 cm-3 in MeV self-implanted czochralski and float zone silicon

Applied Physics Letters

Volumn 69, Issue 27, 1996, Pages 4203-4205

  Kononchuk, O ^a   Brown, R A ^a   Radzimski, Z ^a   Rozgonyi, G A ^a   Gonzalez, F ^b  

^a North Carolina State University   (United States)

^b MICRON TECHNOLOGY INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038931379     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116986     Document Type: Article

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