The preparation of transparent electrically conducting indium oxide films by reactive vacuum evaporation

Vacuum

Volumn 48, Issue 6, 1997, Pages 547-550

  Gopchandran, K G ^a   Joseph, B ^a   Abraham, J T ^a   Koshy, P ^a,b   Vaidyan, K V ^a  

^a UNIVERSITY OF KERALA   (India)

^b REGIONAL RESEARCH LABORATORY CSIR   (India)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; EVAPORATION; FILM PREPARATION; LIGHT TRANSMISSION; PRESSURE EFFECTS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM COMPOUNDS; THERMAL EFFECTS; TRANSPARENCY; VACUUM APPLICATIONS; X RAY DIFFRACTION ANALYSIS;

REACTIVE THERMAL EVAPORATION; REACTIVE VACUUM EVAPORATION;

SEMICONDUCTING FILMS;

EID: 0031152474     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(97)00023-7     Document Type: Article

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