Electrical and structural properties of RGTO-In2O3 sensors for ozone detection

Sensors and Actuators, B: Chemical

Volumn 57, Issue 1-3, 1999, Pages 188-191

  Faglia, G ^a   Allieri, B ^a   Comini, E ^a   Depero, L E ^a   Sangaletti, L ^a   Sberveglieri, G ^a  

^a UNIVERSITY OF BRESCIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CATALYSTS; ELECTRIC PROPERTIES; GOLD; HEAT TREATMENT; INDIUM COMPOUNDS; OXIDATION; OZONE; SPUTTERING; TEMPERATURE; THIN FILMS; X RAY DIFFRACTION;

INDIUM OXIDE THIN FILMS; STRUCTURAL PROPERTIES; SURFACE REACTIONS;

CHEMICAL SENSORS;

EID: 0033533275     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(99)00079-9     Document Type: Article

References (6)

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2. 3 thin films for ozone sensing, in: Transducers '97, Vol. 1, Chicago, June 1997, pp. 573-576.
3. T. Doll, I. Fuchs, A. Eisele, G. Faglia, S. Groppelli, G. Sberveglieri, Room temperature ozone sensing with conductivity and work function sensors based on indium oxide, in: Transducers '97, Vol. 1, Chicago, June 1997, pp. 577-580.
4. Sberveglieri G. Recent developments in semiconducting film gas sensors. Sensors and Actuators B. 23:1995;103-109.
5. L. Dori, P. Maccagnani, G.C. Cardinali, M. Fiorini, I. Sayago, S. Guerri, R. Rizzoli, G. Sberveglieri, New materials and heater geometry for high performance micromachined thermally insulated structures in gas sensor applications, in: Proc. of Eurosensors XI, Vol. 1, Warsaw, September 1997, pp. 289-292.
6. 2: micro-Raman mapping and X-ray diffraction studies. J. Mater. Res. 13:1998.