Ion-implantation in diamond and diamond films: Doping, damage effects and their applications

Applied Surface Science

Volumn 117-118, Issue , 1997, Pages 558-569

  Kalish, Rafi ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Diamond; Ion implantation; N type doping

Indexed keywords

CHEMICAL VAPOR DEPOSITION; CRYSTAL DEFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; ION IMPLANTATION; SEMICONDUCTOR DOPING;

HIGH PRESSURE HIGH TEMPERATURE CRYSTAL GROWTH;

SEMICONDUCTING DIAMONDS;

EID: 0031548248     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)80142-0     Document Type: Article

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