SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 401, Issue 1-2, 2001, Pages 203-210

A new technique to measure through film thickness fracture toughness

(2) Tsui, Ting Y a Joo, Young Chang b

a ADVANCED MICRO DEVICES (United States)

b Seoul National University (South Korea)

Author keywords

Aluminum; Fracture toughness; Indentation; Nickel phosphorus; Thin film

Indexed keywords

BENDING MOMENTS; CRACK PROPAGATION; FINITE ELEMENT METHOD; FRACTURE TOUGHNESS; HARDNESS; INDENTATION; ION BEAMS; MULTILAYERS; SUBSTRATES; TENSILE STRESS;

CRACK TIP OPENING DISPLACEMENT MODEL (CTOD);

THIN FILMS;

EID: 0035904911 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(01)01613-3 Document Type: Article

Times cited : (14)

References (31)

1
- 0024129196
- (1998) CRC Crit. Rev. Solid State Mater. Sci. , vol.14 , pp. 225
- Doerner, M.F.¹ Nix, W.D.²

2
- 0024766321
- (1989) Metall. Trans. A , vol.20 , pp. 2217
- Nix, W.D.¹

3
- 0026903429
- (1992) J. Mater. Res. , vol.7 , pp. 2040
- Venkatraman, R.¹ Bravman, J.C.²

4
- 0000853521
- (1990) J. Appl. Phys. , vol.67 , pp. 2927
- Flinn, P.A.¹ Chiang, C.²

5
- 0023435975
- (1987) Thin Solid Films , vol.153 , pp. 185
- Oliver, W.C.¹ McHargue, C.J.² Zinkle, S.J.³

6
- 0001356099
- (1996) Appl. Phys. Lett. , vol.68 , pp. 779
- Pharr, G.M.¹ Callahan, D.L.² McAdams, S.D.³ Tsui, T.Y.⁴ Anders, S.⁵ Anders, A.⁶ Ager III, J.W.⁷ Brown, I.G.⁸

7
- 0030391989
- (1996) Mater. Res. Soc. Symp. Proc. , vol.436 , pp. 207
- Tsui, T.Y.¹ Oliver, W.C.² Pharr, G.M.³

8
- 0006863980
- Ph.D. Thesis, Rice University
- (1996) Factors Limiting the Accuracy of Mechanical Property Measurements by Nano-Indentation
- Tsui, T.Y.¹

9
- 0031339776
- J.J. Clement, J.D. Sanchez Jr., K.S. Krisch, Z. Suo, R.R. Keller (Eds.), Materials Reliability in Microelectronics VII, San Francisco, USA, March 31-April 3 1997
- (1997) Materials Research Society Symposium Proceeding , vol.473 , pp. 57
- Tsui, T.Y.¹ Ross, C.A.² Pharr, G.M.³

10
- 0031364067
- J.J. Clement, J.D. Sanchez Jr., K.S. Krisch, Z. Suo, R.R. Keller (Eds.), Materials Reliability in Microelectronics VII, San Francisco, USA, March 31-April 3, 1997
- (1997) Materials Research Society Symposium Proceeding , vol.473 , pp. 51
- Tsui, T.Y.¹ Ross, C.A.² Pharr, G.M.³

11
- 84945770363
- (1987) J. Mater. Res. , vol.1 , pp. 845
- Doerner, M.F.¹ Gardner, D.S.² Nix, W.D.³

12
- 0000366813
- (1994) Appl. Phys. Lett. , vol.65 , pp. 2672
- Gorbatkin, S.M.¹ Rhodes, R.L.² Tsui, T.Y.³ Oliver, W.C.⁴

13
- 0030081276
- (1996) Acta Mater. , vol.44 , pp. 625
- Dauskardt, R.¹ Ager, J.²

14
- 0001449152
- (1997) Phys. Rev. Lett. , vol.78 , pp. 3923
- Wetzel, C.¹ Suski, T.² Ager, J.W.³ Weber, E.R.⁴ Haller, E.E.⁵ Fischer, S.⁶ Meyer, B.K.⁷ Molnar, R.J.⁸ Perlin, P.⁹

15
- 2842559347
- (1996) Phys. Rev. B Condens. Matter , vol.54 , pp. 17745
- Kisielowski, C.¹ Kruger, J.² Ruvimov, S.³ Suski, T.⁴ Ager, J.W.⁵ Jones, E.⁶ Lilientalweber, Z.⁷ Rubin, M.⁸ Weber, E.R.⁹ Bremser, M.D.¹⁰ Davis, R.F.¹¹

16
- 0029342943
- (1995) J. Mater. Res. , vol.10 , pp. 1693
- Leung, D.K.¹ He, M.Y.² Evans, A.G.³

17
- 0033285193
- C.A. Volkert, A.H. Verbruggen, D. Brown (Eds.), Materials Reliability in Microelectronics IX, San Francisco, USA, April 5-9, 1999
- (1999) Materials Research Society Symposium Proceeding , vol.563 , pp. 285
- Ma, Q.¹ Tran, Q.² Sun, B.³ El-Mansy, S.⁴ Sun, J.⁵ Fujimoto, H.⁶

18
- 0003638319
- CRC Press, Boca Raton, FL
- (1995) Fracture Mechanics - Fundamentals and Applications, second ed
- Anderson, T.L.¹

19
- 0006830481
- (1998) Microsc. Microanal. , vol.98 , pp. 656
- Susnitzky, D.W.¹ Johnson, K.D.²

20
- 0032662723
- (1999) J. Mater. Res. , vol.14 , pp. 2204
- Tsui, T.Y.¹ Vlassak, J.V.² Nix, W.D.³

21
- 0031621437
- R.C. Cammarata, E.P. Busso, M. Nastasi, W.C. Oliver (Eds.), Thin-Films-Stresses and Mechanical Properties VII, Boston, USA, December 1-5, 1997
- (1998) Materials Research Society Symposium Proceedings , vol.505 , pp. 65
- Hay, J.C.¹ Pharr, G.M.²

22
- 84965949985
- (1966) J. Strain Anal. , vol.1 , pp. 145
- Burdekin, F.M.¹ Stone, D.E.W.²

23
- 0003291186
- Plastic zone near a crack and fracture toughness
- (1961) Sagamore Research Conference Proceedings
- Irwin, G.R.¹

24
- 84980287971
- (1968) J. Appl. Mech. , vol.35 , pp. 379
- Rice, J.R.¹

25
- 0000479825
- Unstable crack propagation in metals: Cleavage and fast fracture
- Cranfield, UK
- (1961) Proceedings of The Crack Propagation Symposium
- Wells, A.A.¹

26
- 0000638994
- (1958) Proc. Am. Soc. Testing Mater. , vol.58 , pp. 640
- Irwin, G.R.¹ Kies, J.A.² Smith, H.L.³

27
- 0001432357
- (1963) Br. Welding J. , vol.10 , pp. 563
- Wells, A.A.¹

28
- 50549180512
- (1960) J. Mech. Phys. Solids , vol.8 , pp. 100
- Dugdale, D.S.¹

29
- 0006862233
- Monte-Carlo TRIM, the transport of ions in matter
- IBM Research, Yorktown, NY
- (1998) SRIM2000
- Biersack, J.P.¹ Ziegler, J.F.²

30
- 0002184510
- Microindentation techniques in materials science and engineering
- P.J. Blau, B.R. Lawn (Eds.), American Society for Testing and Materials, Philadelphia, PA
- (1986) ASTM STP , vol.889 , pp. 5-24
- Tabor, D.¹

31
- 0003963323
- McGraw-Hill, New York
- (1990) Mechanical Behavior of Materials
- Courtney, T.H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.