Effects of adhesion on the measurement of thin film mechanical properties by nanoindentation

Materials Research Society Symposium - Proceedings

Volumn 473, Issue , 1997, Pages 51-56

  Tsui, T Y ^a   Ross, C A ^a   Pharr, G M ^a  

^a ADVANCED MICRO DEVICES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADHESION; ALUMINUM; ALUMINUM COMPOUNDS; CERAMIC MATERIALS; DELAMINATION; GLASS; HARDNESS TESTING; INTERFACES (MATERIALS); MECHANICAL VARIABLES MEASUREMENT; SAPPHIRE; SILICATES; THIN FILMS;

ALUMINUM OXYNITRIDE; INTERFACIAL DEBONDING; NANOINDENTATION TESTING;

METALLIC FILMS;

EID: 0031364067     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-473-51     Document Type: Conference Paper

References (8)