Deposition mechanism of diamond-like carbon and cubic boron nitride

Radiation Effects and Defects in Solids

Volumn 142, Issue 1-4, 1997, Pages 63-90

  Robertson, J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Cubic boron nitride; Diamond like carbon; Ion beam processing; Ion solid interactions; Low energy ions

Indexed keywords

COMPUTER SIMULATION; CUBIC BORON NITRIDE; DEPOSITION; FILM GROWTH; ION BEAMS; ION BOMBARDMENT; ION IMPLANTATION;

DIAMOND LIKE CARBON; ION BEAM DEPOSITION;

CARBON;

EID: 0031376403     PISSN: 10420150     EISSN: None     Source Type: Journal    
DOI: 10.1080/10420159708211597     Document Type: Article

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