Interface studies of tungsten gate metal-oxide-silicon capacitors

Applied Physics Letters

Volumn 78, Issue 20, 2001, Pages 3139-3141

  Shang, Huiling ^a   White, Marvin H ^a   Guarini, Kathryn W ^b   Solomon, Paul ^b   Cartier, Eduard ^b   McFeely, Fenton R ^b   Yurkas, John J ^b   Lee, Wen Chin ^b,c  

^a LEHIGH UNIVERSITY   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035858302     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1372340     Document Type: Article

References (16)

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