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Volumn 79, Issue 23, 2001, Pages 3797-3799

Degradation in metal-oxide-semiconductor structure with ultrathin gate oxide due to external compressive stress

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0035803250     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1420491     Document Type: Article
Times cited : (17)

References (17)
  • 1
    • 0040878268 scopus 로고    scopus 로고
    • Semiconductor Industry Association, International Technology Roadmap for Semiconductors
    • Semiconductor Industry Association, International Technology Roadmap for Semiconductors, 1999.
    • (1999)
  • 17
    • 0039692233 scopus 로고    scopus 로고
    • M. S. thesis, Department of Electrical Engineering, National Taiwan University
    • W.-R. Chen, M. S. thesis, Department of Electrical Engineering, National Taiwan University, 1999.
    • (1999)
    • Chen, W.-R.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.