Epitaxial growth of ZnO thin films on LiNbO3 substrates

Thin Solid Films

Volumn 347, Issue 1-2, 1999, Pages 238-240

  Matsubara, K ^a   Fons, P ^a   Yamada, A ^a   Watanabe, M ^a   Niki, S ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL LATTICES; CRYSTAL ORIENTATION; EPITAXIAL GROWTH; LITHIUM COMPOUNDS; MAGNETRON SPUTTERING; SAPPHIRE; SUBSTRATES; TEMPERATURE; X RAY DIFFRACTION; ZIRCONIA;

CRYSTALLINITY; LATTICE MISMATCH; RADIO FREQUENCY MAGNETRON SPUTTERING; ROCKING CURVE FULL WIDTH AT HALF MAXIMUM;

THIN FILMS;

EID: 0344771144     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00037-1     Document Type: Article

References (12)

1. Vispute R.D., Talyansky V., Trajanovic Z., Choopun S., Downes M., Sharma R.P., Venkatesan T., Woods M.C., Lareau R.T., Jones K.A., Iliadis A.A. Appl. Phys. Lett. 70:1997;2735.
2. Segawa Y., Ohtomo A., Kawasaki K., Koinuma H., Tang Z.K., Yu P., Wong K.L. Phys. Stat. Sol. (b). 202:1997;669.
3. Hachigo A., Nakahata H., Higaki K., Fujii S., Shikata S. Appl. Phys. Lett. 65:1994;2556.
4. Minegishi K., Koiwai Y., Kikuchi Y., Yano K., Kasuga M., Shimizu A. Jpn. J. Appl. Phys. 36:1997;L1453.
5. Olvera M.delaL., Maldonado A., Asomoza T., Konagai M., Asomoza M. Thin Solid Films. 229:1993;196.
6. Manabe Y., Mitsuyu T. Jpn. J. Appl. Phys. 29:1990;334.
7. Tang W., Cameron D.C. Thin Solid Films. 238:1994;83.
8. Quaranta F., Valentini A., Rizzi F.R., Casamassima G. J. Appl. Phys. 74:1993;244.
9. Chen Y., Bagnall D.M., Zhu Z., Sekiuchi T., Park K., Hiraga K., Yao T., Koyama S., Shen M.Y., Goto T. J. Cryst. Growth. 181:1997;165.
10. P. Fons, S. Niki, A. Yamada, K. Matsubara, Appl. Phys. Lett. (1998) submitted.
11. Arakawa T., Shimaoka G. Appl. Surf. Sci. 33/34:1988;501.
12. Johnson M.A.L., Fujita S., Rowland W.H. Jr., Hughes W.C., Cook J.W. Jr., Schetzina J.F. J. Electron. Mater. 25:1996;855.