Novel micro gas sensor with high selectivity based on both mass and conductivity measurement

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2000, Pages 108-113

  Xu, Tao ^a   Wu, Guoying ^a   Zhang, Guobing ^a   Wang, Wei ^a   Li, Ting ^a  

^a PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; COMPUTER SIMULATION; ELECTRIC CONDUCTIVITY MEASUREMENT; MASS TRANSFER; MICROSENSORS;

CHARGE-MASS RATIO; MICRO-GAS SENSORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0033719379     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (17)