Physical and reliability issues in MEMS micro-relays with gold contacts

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4558, Issue , 2001, Pages 11-21

  Lafontan, Xavier ^a,b   Pressecq, Francis ^a   Perez, Guy ^a   Dufaza, Christian ^b   Karam, Jean Michel ^c  

^a LIRMM   (France)

^b CNES   (France)

^c MEMSCAP   (France)

Author keywords

Contact quality; Gold contact modeling; MEMS relay; Micro switch characterization; MUMPs; Reliability

Indexed keywords

ADHESION; COMPUTER SIMULATION; MICROACTUATORS; OPTICAL DESIGN; OPTICAL SWITCHES; WEAR RESISTANCE;

MICRO-RELAYS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035763548     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.443006     Document Type: Article

References (31)

1. K. Petersen, "Micromechanical membrane switches on silicon", IBM J. Res. Develop., vol. 23, pp. 376-385, 1979.
2. Gina Roos, "Bringing MEMs from R & D to reality - A handful of companies have developed microrelay prototypes, but full production is a long way off", January 29, 1998, Issue 1093, Section: Extra: Switch & Relay.
3. Zavracky Paul, NorthEastern University, Boston, Mass., USA, "Micromechanical switch with insulated switch contact", US Patent 5.638.946, 17 June 1997.
4. Paul M. Zavracky, Sumit Majumder, Nicol E. McGruer, "Micromechanical switches fabricated using nickel surface micromachining", Journal of Microelectromechanical systems, vol.6, NO.1, march 1997, p.3-9.
5. Paul Zavracky, "Electrostatically actuated micromechanical switches using surface micromachining", web ref: http://www.ece.neu.edu/edsnu/zavracky/mfl/programs/relays/relays.html.
6. Teledyne web site: http://www.teledyne.com.
7. Taylor William & al., Georgia Tech Research Corporation, Atlanta, Ga, USA, "Magnetic relay system and method capable of microfabrication production", US Patent 5.847.631, 8 December 1998.
8. De Los Santos, H.J.; Yu-Hua Kao; Caigoy, A.L.; Ditmars, E.D., "Microwave and mechanical considerations in the design of MEM switches for aerospace applications", Aerospace Conference, 1997. Proceedings., IEEE, Volume: 3, 1997, Page(s): 235 - 254 vol.3.
9. Hyman, D.; Schmitz, A.; Warneke, B.; Hsu, T.Y.; Lam, J.; Brown, J.; Schaffner, J.; Walston, A.; Loo, R.Y.; Tangonan, G.L.; Mehregany, M.; Lee, J., "GaAs-compatible surface-micromachined RF MEMS switches", Electronics Letters, Volume: 35 Issue: 3, 4 Feb. 1999, Page(s): 224 - 226.
10. Goldsmith C.; Tsen-Hyang Lin; Powers B.; Wen-Rong Wu; Norvell B.; Texas Instruments, Micromechanical membrane switch for microwave applications, Microwave Symposium Digest, 1995, IEEE MTT-S International, vol. 1, p.91-94.
11. Goldsmith C.; Randall J.; Eshelman S.; Lin T.H. Denniston D.; Chen S.; Norvell B.; Texas Instrument, "Characteristics of micromachined switches at microwave frequencies", Microwave Synmposium Digest, 1996, IEEE MTT-S International, vol.2, p.1141-1144.
12. Goldsmith C.; Zhimin Yao; Eshelman S.; Denniston D.; Raython Syst. Corp., "Performance of low-loss RF MEMS capacitive switches", IEEE Microwave and Guided Wave Letters, Aug. 1998, vol8. p.269-271.
13. Yao, Z.J.; Chen, S.; Eshelman, S.; Denniston, D.; Goldsmith, C. "Micromachined low-loss microwave switches", Microelectromechanical Systems, Journal of, Volume: 8 Issue: 2, June 1999, Page(s): 129 -134.
14. William C. Tang, "MEMS Programs at MEMS Programs at DARPA", 2000, http://www.darpa.mil/MTO/MEMS.
15. Brown, E.R., "RF MEMS for digitally-controlled front-end components", Innovative Systems in Silicon, 1997. Proceedings., Second Annual IEEE International Conference on 8-10 Oct. 1997, p.338.
16. Leti, IRCOM, Alcatel Business Systems, STMicroelectronics "MEMS Microswitch for communications systems", RMNT web site: http://www.rmnt.org/resumlab99.html#MIRA.
17. C.M. Song, "Micromachined RF switches", Design Test Integration and Packaging of MEMS/MOEMS Symposium, Mandelieu-Cannes, 25-27 April 2001.
18. Jean-Pierre Fortéa, Francis Pressecq, Guy Perez et Xavier Lafontan, "CNES Approach for Qualification and Reliability of MEMS for Space Applications", SMTA International Conference, Donald Stephens Convention Center, Chicago, Illinois, September 30 - October 4, 2001.
19. Francis Pressecq, Guy Perez et Xavier Lafontan, "CNES Quality Approach on MEMS Technology", 3RD ESA Round Table on Micro/Nano-Technologies for Space, 15-17 May, Noordwijk.
20. R. Holm, "Electric contacts, theory and applications", Springer-Verlag, Berlin, 4th ed., 1967.
21. Swartjes H.M., Jansen A.G.M. and Wyder P., "Magnetoresistance of metallic point contacts", Phys. Rev., B38, 1988, p8114-8120.
22. Louis Féchant, "Le contact électrique, Phénomènes physiques et matériaux", Hermes, 1996.
23. J.P. Beale and R.F.W. Pease, "Apparatus for Studying Ultrasmall Contacts", Proceedings of the Thirty-Eight IEEE Holm Conference on Electrical Contacts, Philadelphia, PA, USA, 18-21 Oct 1992 p45-49.
24. M.P. De Boer and T.A. Michalske, "Accurate Method For Determining Adhesion of Cantilever Beams", Published in the Journal of Applied Physics, July 15, 1999, Volume 86, pp. 817-827.
25. M.P. De Boer, J.A. Knapp, J.M. Redmond, T.A. Michalske, R. Maboudian, "Adhesion, Adhesion Hysteresis and Friction in MEMS conference in Anaheim, CA, Symposium on Microscale Mechanics of Materials and Structures, Nov. 1998.
26. M.P. De Boer, P.J. Clews, B.K. Smith and T.A. Michalske, "Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients", Presented at the Materials Research Society Proceedings, San Francisco, CA, Symposium on Microelectromechanical Structures for Materials Research, April 15-16, 1998, Vol. 518, pp. 131-136.
27. Maarten P. de Boer and Terry A. Michalske, "Improved Autoadhesion Measurement Method for Micromachined Polysilicon Beams", Presented at the Materials Research Society Meeting, Symposium on Materials for Mechanical and Optical Microsystems, Boston, MA, Dec. 2-3, 1996. Published in Materials Research Society Proceedings, Vol. 444, pp. 87-92. Under Controlled Humidity Ambients", Presented at the ASME IMECE.
28. Ezekiel J.J. Kruglick, "Microrelay design, performance, and systems", Thesis dissertation, University of California, Berkeley; 1999.
29. Edward Keat Leem Chan, "Characterization and modeling of electrostatically actuated polysilicon micromechanical devices", Thesis Dissertation, Stanford, November 2000.
30. Xavier Lafontan, Christian Dufaza, Michel Robert, Guy Perez and Francis Pressecq, "RF MEMS Micro-Switches Design and Characterization", SPIE Micromachining and Microfabrication Symposium, Santa Clara Marriott, Californie, USA, vol. 4019, pp. 236-243, 17-20 September 2000.
31. MUMPs data run, CRONOS web site: http://www.memsrus.com/cronos/figs/pstress.gif.