Improved autoadhesion measurement method for micromachined polysilicon beams

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 87-92

  de Boer, Maarten P ^a   Michalske, Terry A ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; FRACTURE MECHANICS; MECHANICAL VARIABLES MEASUREMENT; OPTICAL MICROSCOPY; SEMICONDUCTOR DEVICES;

AUTOADHESION; CANTILEVER BEAMS; MICROMACHINED POLYSILICON BEAMS; OCTADECYLTRICHLOROSILANE;

ADHESION;

EID: 0030701346     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (22)