Polarized light scattering from metallic particles on silicon wafers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4449, Issue , 2001, Pages 281-290

  Kim, Jung Hyeun ^a   Ehrman, Sheryl H ^a   Mulholland, George W ^a   Germer, Thomas A ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Copper; Gold; Inspection; Metal; Particles; Polarization; Scattering; Spheres

Indexed keywords

COPPER; DEPOSITION; GOLD; LIGHT POLARIZATION; OPTICAL PROPERTIES; SILICON WAFERS;

DIFFERENTIAL SCATTERING CROSS SECTION; GONIOMETRIC OPTICAL SCATTER INSTRUMENT; VISIBLE LASER LIGHT;

LIGHT SCATTERING;

EID: 0035761325     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.450105     Document Type: Conference Paper

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