Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2862, Issue , 1996, Pages 130-138

  Starr, Greg W ^a   Hirleman, E Dan ^a  

^a Department of Mechanical and Aerospace Engineering ^*  (United States)

Author keywords

Differential cross section; Differential scattering cross section; Light scattering; Optical inspection; Patterned surfaces

Indexed keywords

FLAT PANEL DISPLAYS; LIGHT SCATTERING; SILICON WAFERS; SURFACE ROUGHNESS;

ANGLE RESOLVED SCATTERING; ANGLE-RESOLVED SCATTERS; DIFFERENTIAL CROSS SECTION; DIFFERENTIAL SCATTERING CROSS SECTION; OPTICAL INSPECTION; PATTERNED SURFACE; SEMI-CONDUCTOR SURFACES; SUB-MICRON PARTICLES;

SURFACE SCATTERING;

EID: 0001650561     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.256197     Document Type: Conference Paper

References (5)

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