Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 2862, Issue , 1996, Pages 130-138

  Starr, Greg W ^a   Hirleman, E Dan ^a  

^a Arizona State University   (United States)

Author keywords

Differential cross section; Differential scattering cross section; Light scattering; Optical inspection; Patterned surfaces

Indexed keywords

FLAT PANEL DISPLAYS; LIGHT SCATTERING; SILICON WAFERS; SURFACE ROUGHNESS;

ANGLE RESOLVED SCATTERING; ANGLE-RESOLVED SCATTERS; DIFFERENTIAL CROSS SECTION; DIFFERENTIAL SCATTERING CROSS SECTION; OPTICAL INSPECTION; PATTERNED SURFACE; SEMI-CONDUCTOR SURFACES; SUB-MICRON PARTICLES;

SURFACE SCATTERING;

EID: 0001650561     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.256197     Document Type: Conference Paper

References (5)

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2. Warner, Thomas L., "Characterization of Light Scatter by Particles of Various Refractive Indices on Semiconductor Surfaces", Master's Thesis, Arizona State University, Dept. of Mechanical and Aerospace Engineering, 1994.
3. E. Hecht, Optics. Addison-Wesley, Reading, 1987.
4. Bohren, Craig F., and Huffman, Donald R., Absorption and Scattering of Light by Small Particles Wiley-Interscience, New York, 1983, 71.
5. R. S. Howland, S. E. Stokowski, F. Dumesnil, G. Saiz, C. T. Larson, K. P. Gross, and N. Yin, MICRO Jul/Aug. (1995), 61.