Batch assembly micro-ball lens array for Si-based optical coupling platform in free space

Optical Review

Volumn 8, Issue 5, 2001, Pages 373-377

  Shen, Sheng Chih ^a   Pan, Cheng Tang ^b   Chou, Hwai Pwu ^a   Chou, Min Chieh ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Anisotropic etching; Micro ball lens; Optical coupling platform; V groove; Wafer bonding

Indexed keywords

EID: 0035740635     PISSN: 13406000     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10043-001-0373-1     Document Type: Article

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