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Volumn 48, Issue 6 I, 2001, Pages 1879-1884
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A study of ion energy and its effects upon an SEGR-hardened stripe-cell MOSFET technology
a
IEEE
(United States)
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Author keywords
Charge deposition; Hexagonal cell; Ion energy; LET; Penetration depth; Power MOSFET; Single even gate rupture; Stripe cell; Tilt angle
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Indexed keywords
CYCLOTRONS;
ELECTRIC BREAKDOWN;
ENERGY TRANSFER;
ION BEAMS;
IONIZATION;
THRESHOLD VOLTAGE;
SINGLE EVENT GATE RUPTURE (SEGR);
MOSFET DEVICES;
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EID: 0035723223
PISSN: 00189499
EISSN: None
Source Type: Journal
DOI: 10.1109/23.983146 Document Type: Conference Paper |
Times cited : (29)
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References (21)
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