A Model Reduction Method for the Dynamic Analysis of Microelectromechanical Systems

International Journal of Nonlinear Sciences and Numerical Simulation

Volumn 2, Issue 2, 2001, Pages 89-100

  Lin, W Z ^a   Lee, K H ^b   Lim, S P ^b   Lu, P ^a  

^a INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Galerkin procedure; Karhunen Lo ve decomposition; Macromodels; Microelectromechanical systems; Model reduction; Squeezed gas film damping

Indexed keywords

EID: 0035629905     PISSN: 15651339     EISSN: None     Source Type: Journal    
DOI: 10.1515/IJNSNS.2001.2.2.89     Document Type: Article

References (19)

1. Senturia, S.D. CAD Challenges for Microsensors, Microactuators, and Microsystems, Proc. IEEE, 86(1998)1611-1626
2. Tilmans, H.A.C. Equivalent Circuit Representation of Electromechanical Transducers: I. Lumped-Parameter Systems (Micromechanical Systems), J. Micromech. Microeng., 6(1996)157-176
3. Anathasuresh, G.K., Gupta, R.K. and Senturia, S.D. An Approach to Macromodelling of MEMS For Nonlinear Dynamic Simulation, Microelectromechanical Systems (MEMS), ASME, DSC 59(1996)401-407
4. Gabbay, L.D. Computer Aided Macromodelling for MEMS, PhD Thesis, Dept of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, 1998
5. Gabbay, L.D. and Senturia, S.D. Automatic Generation of Dynamic Macromodels Using Quasistatic Simulations in Combination with Modal Analysis, Proc. 1998 Solid-State Sensor and Actuator Workshop, Hilton Head, (1998)197-220
6. Wang, F. and White, J. Automatic Model Order Reduction of A Microdevice Using The Arnoldi Approach, Microelectromechanical Systems (MEMS), ASME, DSC 66(1998)527-530
7. Sirovich, L. Turbulence And The Dynamics of Coherent Structures Part I-III: Coherent Structures, Quart. App. Math., XLV(1987)561-571, 573-582, 583-590
8. Fukunaga, K. Introduction to Statistical Pattern Recognition, Second Edition, Boston: Academic Press, 1990
9. Berkooz, G., Holmes, P. and Lumley, L. The Proper Orthogonal Decomposition in The Analysis of Turbulent Flows, Annu. Rev. Fluid Mech., 25(1993)539-575
10. Sirovich, L. and Park, H. Turbulent Thermal Convection in A Finite Domain: Part I. Theory, Phys. Fluids A, 2(1990)1649-1658
11. Sirovich, L. and Park, H. Turbulent Thermal Convection in A Finite Domain: Part II. Numerical Results, Phys. Fluids A, 2(1990)1659-1668
12. Park, H.M. and Cho, D.H. The Use of The Karhunen-Loève Decomposition For The Modeling of Distributed Parameter Systems, Chem. Eng. Sci., 51(1996)81-98
13. Hung, E.S. and Senturia, S.D. "Generating Efficient Dynamical Models For Microelectromechanical Systems from A Few Finite-Element Simulation Runs," J. of Microelectromechanical Systems, 8(1999)280-289
14. Gupta, R.K., Osterberg, P.M. and Senturia, S.D. Material Property Measurements of Micromechanical Polysilicon Beams, Proc. SPIE 1996: Microlithograph and Metrology in Micromachining II, Austin, TX, (1996)39-45
15. Veijola, T. Equivalent-Circuit Model of The Squeezed Gas Film in A Silicon Accelerometer, Sensors and Actuators A, 48(1995)239-248
16. Gupta, R.K. and Senturia, S.D. Pull-in Time Dynamics As A Measure of Absolute Pressure, Proc. MEMS 1997, (1997)290-294
17. Hamrock, B.J. Fundamentals of Fluid Lubrication, New York: McGraw-Hill, 1994
18. Press, W.H., Teukolsky, S.A., Vetterling, W.T. and Flannery, B.P. Numerical Recipes in Fortran: The Art of Scientific Computing, Cambridge: Cambridge University Press, 1992
19. Osterberg, P.M. and Senturia, S.D. M-Test: A Test Chip for MEMS Material Property Measurement Using Eletrostatically Actuated Test Structures, IEEE J. Microelectromech. Syst., 6(1997)107-118