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Journal of the Korean Physical Society

Volumn 39, Issue SUPPL. Part 1, 2001, Pages

Dry etching of SrBi2Ta2O2 thin films for FRAM applications

(5) Im, Y H a Park, J S a Choi, R J a Hahn, Y B a Choi, C S a

a Chonbuk National University (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035542114 PISSN: 03744884 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (5)

References (14)

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