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Volumn 36, Issue 5, 2001, Pages 487-500
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The use of circular optical grating for measuring angular rotation of mirrors
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Author keywords
Circular optical grating; Micro mirror
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Indexed keywords
INTERFEROMETERS;
LASER APPLICATIONS;
LIQUID CRYSTAL DISPLAYS;
MIRRORS;
OPTICAL PROJECTORS;
ANGULAR ROTATION;
DIFFRACTION GRATINGS;
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EID: 0035499773
PISSN: 01438166
EISSN: None
Source Type: Journal
DOI: 10.1016/S0143-8166(01)00074-4 Document Type: Article |
Times cited : (11)
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References (31)
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