Electrothermal microactuators based on dielectric loss heating

IEEE Micro Electro Mechanical Systems

Volumn , Issue , 1993, Pages 24-29

  Rashidian, Bizhan ^a   Allen, Mark G ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE ELEMENT METHOD;

ELECTROTHERMAL MICROACTUATORS; MICROACTUATION; TRIFLUOROETHYLENE; VINYLIDINE FLUORIDE;

ACTUATORS;

EID: 0027224679     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)