Two-dimensional optical scanner with large angular rotation realized by self-assembled micro-elevator

LEOS Summer Topical Meeting

Volumn , Issue , 1998, Pages 107-108

  Fan, Li ^a   Wu, Ming C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; SCANNING;

MICRO ELEVATORS BY SELF ASSEMBLY (MESA); TWO DIMENSIONAL OPTICAL SCANNERS;

MIRRORS;

EID: 0031629145     PISSN: 10994742     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)