Chemistry and aging of organosiloxane and fluorocarbon films grown from hyperthermal polyatomic ions

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 4, 2001, Pages 1531-1536

  Hanley, Luke ^a   Fuoco, Erick ^a   Wijesundara, Muthu B J ^a   Beck, Alison J ^b   Brookes, Pat N ^b   Short, Robert D ^b  

^a UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

^b UNIVERSITY OF SHEFFIELD   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; BINDING ENERGY; FILM GROWTH; FLUOROCARBONS; ION IMPLANTATION; KINETIC ENERGY; POLYSTYRENES; SECONDARY ION MASS SPECTROMETRY; STRUCTURE (COMPOSITION); SURFACE PROPERTIES; SURFACE TREATMENT; X RAY PHOTOELECTRON SPECTROSCOPY;

ORGANOSILOXANE (OS); POLYATOMIC IONS;

THIN FILMS;

EID: 0035393315     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1349723     Document Type: Article

References (20)