Pyrolytic CVD of Poly(organosiloxane) Thin Films

Chemical Vapor Deposition

Volumn 3, Issue 6, 1997, Pages 299-301

  Kwan, Michael C ^a   Gleason, Karen K ^a  

^a USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000304768     PISSN: 09481907     EISSN: None     Source Type: Journal    
DOI: 10.1002/cvde.19970030602     Document Type: Article

References (18)

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