SCOPUS 정보 검색 플랫폼

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 899-905

Dynamic stress investigations for cubic boron nitride films deposited by triode sputtering technique

(5) Djouadi, M A a Mortet, V a,b Khandozhko, S a Jouan, P Y b Nouet, G c

a ENSAM (France)

b Laboratoire des Matériaux Avancés Céramiques (France)

c LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux (France)

Author keywords

Cubic boron nitrides; In depth stress profiles; Ion assisted deposition

Indexed keywords

ADHESION; BORON; DEPOSITION; DYNAMIC LOADS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED SPECTROSCOPY; NITRIDES; SPUTTERING; STRESSES; TRANSMISSION ELECTRON MICROSCOPY;

HEXAGONAL PHASE;

THIN FILMS;

FILM;

EID: 0035387807 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01123-9 Document Type: Article

Times cited : (10)

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