Structure investigation of BN films grown by ion-beam-assisted deposition by means of polarised IR and Raman spectroscopy

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 93-99

  Ben El Mekki, M ^a   Djouadi, M A ^a   Guiot, E ^a   Mortet, V ^a   Pascallon, J ^b   Stambouli, V ^b   Bouchier, D ^b   Mestres, N ^c   Nouet, G ^d  

^a ENSAM   (France)

^b UNIVERSITÉ PARIS SACLAY   (France)

^c INSTITUT DE CIÈNCIA DE MATERIALS DE BARCELONA ICMAB CSIC   (Spain)

^d LERMAT Laboratoire d'Etude et de Recherche sur les Materiaux   (France)

Author keywords

C BN; Ion beam assisted deposition; Polarised infrared reflectivity; R BN; Raman spectroscopy; Stress

Indexed keywords

CERAMIC COATINGS; CRYSTAL MICROSTRUCTURE; DEPOSITION; FILM GROWTH; INFRARED SPECTROSCOPY; ION BEAMS; ION BOMBARDMENT; NUCLEATION; RAMAN SPECTROSCOPY; SILICON; STOICHIOMETRY; STRESS ANALYSIS;

ION-BEAM-ASSISTED DEPOSITION;

CUBIC BORON NITRIDE;

EID: 0006816588     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00185-1     Document Type: Article

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