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Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 61-66

Filtered arc deposition and implantation of aluminium nitride

(4) Manova, D a Huber, P a Mandl S a Rauschenbach, B a,b

a UNIVERSITY OF AUGSBURG (Germany)

b UNIVERSITY OF LEIPZIG (Germany)

Author keywords

Aluminium nitride; Arc evaporation; Atomic force microscopy measurements; PIII; X Ray diffraction

Indexed keywords

ALUMINUM NITRIDE; CATHODES; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SAPPHIRE; X RAY DIFFRACTION ANALYSIS;

HIGH VOLTAGE PULSES;

COATINGS;

ALUMINUM; COATING; FILM; NITRIDING; WEAR RESISTANCE;

EID: 0035387319 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(01)01075-1 Document Type: Article

Times cited : (16)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.