Stress, porosity measurements and corrosion behaviour of AlN films deposited on steel substrates

Thin Solid Films

Volumn 359, Issue 2, 2000, Pages 221-227

  Vacandio, F ^a   Massiani, Y ^a   Gergaud, P ^b   Thomas, O ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM CORROSION; CARBON STEEL; ELECTROCHEMISTRY; POROSITY; SEMICONDUCTING ALUMINUM COMPOUNDS; SPUTTERING; STRESS ANALYSIS; SUBSTRATES;

ELECTROCHEMICAL TESTS;

SEMICONDUCTING FILMS;

EID: 0033889921     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00763-4     Document Type: Article

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