Structure and properties of Ti-C-B composite thin films produced by sputtering of composite TiC-TiB2 targets

Surface and Coatings Technology

Volumn 92, Issue 1-2, 1997, Pages 34-41

  Levashov, Evgeny A ^a   Kosayanin, Vaytcheslav I ^a   Krukova, Ludmila M ^a   Moore, John J ^b   Olson, David L ^b  

^a NATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY MISIS   (Russian Federation)

^b Department of Geology and Geological Engineering   (United States)

Author keywords

Composite (Ti C B) thin films; Composite targets; SHS

Indexed keywords

ANNEALING; MAGNETRON SPUTTERING; OXIDATION; RECRYSTALLIZATION (METALLURGY); THERMAL CONDUCTIVITY OF SOLIDS; THERMAL EFFECTS; THERMODYNAMIC STABILITY; TITANIUM ALLOYS; TITANIUM CARBIDE;

COMPOSITE TARGETS; SELF PROPAGATING HIGH TEMPERATURE SYNTHESIS (SHS);

THIN FILMS;

EID: 0031164990     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03083-6     Document Type: Article

References (6)

1. V.G. Grebenkina, Poroshkovaya Metallurgia, 6 (1973) 83.
2. K.A. Osipov, Proceedings of the USSR As. Neorganicheskie Materially, 17, 11 (1981), pp. 2032-2034.
3. Yu.P. Sipikin, Electronic Industry, 1988, 3 (1988) 54.
4. A.G. Merzhanov, Self-Propagating High Temperature Synthesis, Twenty Years of Search and Findings. Preprint of the ISMAN, Chernogolovka, 1988, p. 93.
5. J.J. Moore and H.J. Feng, Progress in Materials Science, 39(4/5) (1995) 243.
6. Z.A. Munir and U. Anselin-Tamburini, Materials Science Reports, 3 (1989) 277.