The effect of rapid thermal annealing on structural and electrical properties of TiB2 thin films

Thin Solid Films

Volumn 300, Issue 1-2, 1997, Pages 272-277

  Todorovic B ^a   Jokic T ^a   Rakocevic Z ^a   Markovic Z ^a   Gakovic B ^a   Nenadovic T ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

Author keywords

Annealing; Electrical properties and measurements; Evaporation; Scanning tunnelling microscopy

Indexed keywords

ANNEALING; CRYSTALLIZATION; DEPOSITION; ELECTRIC CONDUCTIVITY OF SOLIDS; EVAPORATION; GRAIN GROWTH; GRAIN SIZE AND SHAPE; SCANNING TUNNELING MICROSCOPY; SILICON WAFERS; SURFACE ROUGHNESS; TITANIUM COMPOUNDS;

VACUUM ANNEALING;

THIN FILMS;

EID: 0031143319     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(96)09458-8     Document Type: Article

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