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Volumn 13, Issue 2, 2001, Pages
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High-temperature polymers for advanced microelectronics
a,b c a,d d |
Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL BONDS;
DECOMPOSITION;
FLUORINE;
HEAT TREATMENT;
MICROELECTRONICS;
PERMITTIVITY;
SYNTHESIS (CHEMICAL);
HIGH-TEMPERATURE POLYMERS;
POLYETHERS;
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EID: 0035360362
PISSN: 09540083
EISSN: None
Source Type: Journal
DOI: 10.1088/0954-0083/13/2/310 Document Type: Article |
Times cited : (12)
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References (22)
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