Kelvin probe force microscopy images of microstructured organosilane self-assembled monolayers

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 6 B, 2001, Pages 4373-4377

  Sugimura, Hiroyuki ^a   Hayashi, Kazuyuki ^a   Saito, Nagahiro ^a   Takai, Osamu ^a   Nakagiri, Nobuyuki ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b NIKON CORPORATION   (Japan)

Author keywords

Fluoroalkylsilane; Kelvin probe force microscopy; Molecular orbital calculation; Organosilane self assembled monolayer; Surface potential

Indexed keywords

DEPOSITION; ELECTRIC POTENTIAL; IMAGE QUALITY; MICROSCOPIC EXAMINATION; PHOTOLITHOGRAPHY; SELF ASSEMBLY; SILANES; SUBSTRATES; SURFACE PROPERTIES;

KELVIN PROBE FORCE MICROSCOPY; MOLECULAR ORBITAL CALCULATIONS; ORGANOSILANES;

MONOLAYERS;

EID: 0035357885     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.40.4373     Document Type: Article

References (18)