Mechanical Stability and Sticking in a Model Microelectromechanical Systems (MEMS) under Casimir Forces-Part I: Corrections to the Casimir Force

International Journal of Nonlinear Sciences and Numerical Simulation

Volumn 1, Issue , 2000, Pages 373-378

  Ding, Jian Ning ^a   Meng, Yong Gang ^a   Wen, Shi Zhu ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

Casimir force; MEMS; polysilicon

Indexed keywords

EID: 0037763278     PISSN: 15651339     EISSN: None     Source Type: Journal    
DOI: 10.1515/IJNSNS.2000.1.S1.373     Document Type: Article

References (8)

1. Casimir, H. B.G. On the attraction between two perfectly conducting plates, in Proc. Koninkl. Ned. Akad. Wetenschap, 51(1948)793-795
2. Mohideen, U., Roy, A. A precision measurement of the Casimir force from 0.1 to 0.9m, Phys. Rev. Lett., 81(1998)4549-4551
3. Roy, A., Lin C. Y., Mihideen, U. Improved precision measurement of the Casimir force, Phys. Rev. D 60(1999)1101-1106
4. Hirano, T., Furuhata, K., Gabriel, K. J.,Fujita, H. Design, fabrication, and operation of submicron gap comb-drive microactuators, J. Microelectromechanical Syst., 1 %(1%)%(1992)52-59
5. Chen, W., Ahmed, H. Frbrication of high aspect ratio silicon pillars of 10 nm diameter, Appi Phys. Lett., 63(8)%(1993)1116-1118
6. Derjaguin, B. V., Rabinovich, Y. I., Churaev, N. V. Direct measurement of molecular forces, Nature, 272(1978)313-318
7. Bordag, M., Klimchitskaya, G. L., Mostepanenko, V. M. Corrections to the Casimir force betweenplates with stochastic surface, Phys. Lett. A, 200(1995)95-102
8. Palik, E. D. Handbook of optical constants of solids, Academic Press, New York, 1985