Effect of an internal rotating current on low-frequency inductively coupled plasmas

Physical Review E - Statistical Physics, Plasmas, Fluids, and Related Interdisciplinary Topics

Volumn 63, Issue 4, 2001, Pages

  Tsakadze, E L ^a   Ostrikov, K N ^a,b,c,d,e   Xu, X ^a   Jones, I R ^b   Storer, R ^b   Yu, M Y ^c   Lee, S ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b FLINDERS UNIVERSITY   (Australia)

^c RUHR UNIVERSITY BOCHUM   (Germany)

^d NAGOYA UNIVERSITY   (Japan)

^e NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CARRIER CONCENTRATION; ELECTRIC COILS; ELECTRIC CURRENTS; ELECTRODYNAMICS; ELECTROMAGNETIC FIELD EFFECTS; IONS; PLASMA DENSITY;

INTERNAL ROTATING CURRENTS (IRC);

INDUCTIVELY COUPLED PLASMA;

EID: 0035306750     PISSN: 1063651X     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevE.63.046402     Document Type: Article

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