Simulation of a thermomechanically actuated gas sensor

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 184-189

  Emmenegger, M ^a   Taschini, S ^a   Korvink, J G ^a   Baltes, H ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; DAMPING; DEGREES OF FREEDOM (MECHANICS); FINITE ELEMENT METHOD; FREQUENCY DOMAIN ANALYSIS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; SPECTRUM ANALYSIS;

SPACE DISCRETIZATION; THERMOMECHANICAL MODELS;

CHEMICAL SENSORS;

EID: 0031703119     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)