Novel fabrication method of the tiny aperture tip on silicon cantilever for near field scanning optical microscopy

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1999, Pages 360-365

  Phan, Ngoc Minh ^a   Ono, Takahito ^a   Esashi, Masayoshi ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPRESSIVE STRESS; ETCHING; LOW TEMPERATURE EFFECTS; OXIDATION; SILICA; SILICON WAFERS;

NEAR-FIELD SCANNING OPTICAL MICROSCOPY (NSOM); SILICON CANTILEVERS;

OPTICAL MICROSCOPY;

EID: 0032638146     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (21)