Cold remote nitrogen plasma enhanced carbon nitrides CNx films deposition

Vide: Science, Technique et Applications

Volumn , Issue , 1996, Pages 76-78

  Jama, C ^a   Rousseau, V ^a   Dessaux, O ^a   Goudmand, P ^a  

^a UNIV LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; DEPOSITION; EMISSION SPECTROSCOPY; GAS LASERS; HYDROGEN; LASER ABLATION; NITRIDES; NITROGEN; PLASMAS; STOICHIOMETRY; SUBSTRATES;

ADHESIVE HARD FILM; CARBON DIOXIDE LASER ABLATION; CARBON NITRIDE FILMS; COLD REMOTE PLASMAS OF NITROGEN; VISIBLE OPTICAL EMISSION SPECTROSCOPY;

THIN FILMS;

EID: 0029735087     PISSN: 12660167     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)