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Volumn 39, Issue 7 A, 2000, Pages 4088-4093
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Effect of radio frequency power on the properties of hydrogenated amorphous carbon films grown by radio frequency plasma-enhanced chemical vapor deposition
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Author keywords
Amorphous carbon; ESR; FT IR; Photoluminescence; RF plasma enhanced CVD
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Indexed keywords
AMORPHOUS FILMS;
CHEMICAL BONDS;
ENERGY GAP;
FILM GROWTH;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
HYDROGENATION;
PARAMAGNETIC RESONANCE;
PHOTOLUMINESCENCE;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
HYDROGENATED AMORPHOUS CARBON FILMS;
OPTICAL BAND GAP;
PLASMA OPTICAL EMISSION SPECTROSCOPY;
RADIO FREQUENCY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RADIO FREQUENCY POWER;
SPIN DENSITY;
CARBON;
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EID: 0034216165
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.39.4088 Document Type: Article |
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Times cited : (29)
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References (12)
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