SCOPUS 정보 검색 플랫폼

Volumn 16, Issue 2, 2001, Pages 413-416

Modeling of the effects of crystallographic orientation on electromigration-limited reliability of interconnects with bamboo grain structures

(3) Fayad, W R a Andleigh, V K a Thompson, C V a

a Massachusetts Institute of Technology Cambridge (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; CURRENT DENSITY; DIFFUSION; ELECTROMIGRATION; GRAIN BOUNDARIES; INTERFACES (MATERIALS);

BAMBOO GRAIN STRUCTURES; CRYSTALLOGRAPHIC ORIENTATION;

BAMBOO;

BAMBOO; CRYSTAL STRUCTURE; DIFFUSION; INTERFACES; MICROSTRUCTURE;

EID: 0035262021 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0062 Document Type: Article

Times cited : (7)

References (26)

1
- 0000323896
- (1980) Appl. Phys. Lett. , vol.36 , pp. 464
- Vaidya, S.¹ Sheng, T.T.² Sinha, A.K.³

2
- 0000496645
- (1980) Appl. Phys. Lett. , vol.36 , pp. 968
- Kinsborn, E.¹

3
- 0003489118
- Noyes Publication, Park Ridge, NJ
- (1988) Diffusion Phenomena in Thin Films , pp. 369
- Kwok, T.¹ Ho, P.S.²

4
- 0000722238
- (1989) Appl. Phys. Lett. , vol.54 , pp. 2577
- Cho, J.¹ Thompson, C.V.²

5
- 0027608267
- (1993) J. of Electronic Materials , vol.22 , pp. 581
- Thompson, C.V.¹ Kahn, H.²

6
- 0009186144
- (1996) J. Appl. Phys. , vol.79 , pp. 8330
- Kang, S.H.¹ Kim, C.² Morris J.W., Jr.³ Genin, F.Y.⁴

7
- 0029502179
- Materials Reliability in Microelectronics V, edited by A.S. Oates, W.F. Filter, R. Rosenberg, A.L. Greer, and K. Gadepally (Pittsburgh, PA)
- (1995) Mater. Res. Soc. Symp. Proc. , vol.391 , pp. 189-196
- Knowlton, B.D.¹ Clement, J.J.² Frank, R.I.³ Thompson, C.V.⁴

8
- 0001560409
- (1997) J. Appl. Phys. , vol.81 , pp. 6073
- Knowlton, B.D.¹ Clement, J.J.² Thompson, C.V.³

9
- 0031359027
- Materials Reliability in Microelectronics VII, edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Suo (Pittsburgh, PA)
- (1997) Meter. Res. Soc. Symp. Proc. , vol.473 , pp. 387-392
- Theiss, S.K.¹ Prybyla, J.A.² Marcus, M.A.³

10
- 33750899726
- (1995) Mater. Chem. Phys. , vol.41 , pp. 1
- Hu, C.-K.¹ Luther, B.²

11
- 0031245670
- (1997) Thin Solid Films , vol.308-309 , pp. 443
- Hu, C.K.¹ Lee, K.Y.² Gignac, L.³ Carruthers, R.⁴

12
- 0009190760
- edited by J.S. Koehler, F. Seitz, W.T. Read, Jr., and E. Orawan, Institute of Metals, Institute of Metals Division, American Institute of Mining and Metallurgical Engineers, NY, Chap. 2
- (1954) Dislocations in Metals , pp. 37
- Read W.T., Jr.¹ Shockley, W.²

13
- 0000160317
- (1999) J. Appl. Phys. , vol.85 , pp. 3546
- Park, Y.-J.¹ Andleigh, V.K.² Thompson, C.V.³

14
- 0009190761
- (1962) Trans. AIME , vol.224 , pp. 589
- Choi, J.Y.¹ Shewmon, P.G.²

15
- 0023825864
- (1988) Scripta Met. , vol.22 , pp. 65
- Frost, H.J.¹ Thompson, C.V.² Howe, C.L.³ Whang, J.⁴

16
- 0032632573
- (1999) Scripta Mat. , vol.40 , pp. 1199
- Fayad, W.¹ Frost, H.J.² Thompson, C.V.³

17
- 0001964103
- (1992) Appl. Phys. Lett. , vol.61 , pp. 40
- Walton, D.T.¹ Frost, H.J.² Thompson, C.V.³

18
- 4243626372
- (2000) Phys. Rev. B , vol.62 , pp. 5221
- Fayad, W.R.¹ Kobrinsky, M.J.² Thompson, C.V.³

19
- 0031353183
- Materials Reliability in Microelectronics VII, edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Suo (Pittsburgh, PA)
- (1997) Mater. Res. Soc. Symp. Proc. , vol.473 , pp. 217-222
- Besser, P.R.¹ Sanchez, J.E.² Field, D.P.³ Pramanick, S.⁴ Sahota, K.⁵

20
- 0009190274
- (1999) Appl. Phys. Let. , vol.75 , pp. 1464
- Hau-Riege, C.S.¹ Thompson, C.V.²

21
- 0030173939
- (1996) Acta Mat. , vol.44 , pp. 2479
- Carel, R.¹ Thompson, C.V.² Frost, H.J.³

22
- 0025475931
- (1990) Acta Metallurgica et Materiala , vol.38 , pp. 1455
- Frost, H.J.¹ Thompson, C.V.² Walton, D.T.³

23
- 0038035318
- (1993) J. Appl. Phys. , vol.73 , pp. 3790
- Korhonen, M.A.¹ Borgesen, P.² Tu, K.N.³ Li, C.-Y.⁴

24
- 0001318002
- (1997) J. Vac. Sci. and Tech. B , vol.15 , pp. 763
- Harper, J.M.E.¹ Rodbell, K.P.²

25
- 0009190275
- (1999) Appl. Phys. Letts. , vol.75 , pp. 3790
- Chu, X.¹ Prybyla, J.A.² Theiss, S.K.³ Marcus, M.A.⁴

26
- 0031359024
- Materials Reliability in Microelectronics VII, edited by J.J. Clement, R.R. Keller, K.S. Krisch, J.E. Sanchez, Jr., and Z. Suo (Pittsburgh, PA)
- (1997) Mater. Res. Soc. Symp. Proc. , vol.473 , pp. 305-315
- Thouless, M.D.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.