Microstructural evolution induced by scanned laser annealing in Al interconnects

Applied Physics Letters

Volumn 75, Issue 10, 1999, Pages 1464-1466

  Hau Riege, C S ^a   Thompson, C V ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009190274     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.124726     Document Type: Article

References (16)

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